Investigation of Effective parameters on the Density of Vertically-Aligned Carbon Nanotubes Synthesized by CVD Method

Document Type : Research Article

Authors

Thin Film Laboratory, School of Physics, Iran University of Science and Technology (IUST), , Tehran

/amnc.2012.2.7.3

Abstract

In this study, carbon nanotubes (CNTs) was synthesized using ethanol as carbon source and sandwich structure of A1/Co/Al with 1nm Co thickness film as catalyst by chemical vapor deposition (CVD). The effect of the substrate, ethanol flow rate, and growth time on the density and structure of CNTs was investigated. SEM images show growth of low density of CNTs with spaghetti-like structure and also amorphous carbon upon glass and Cu substrates. The density of CNTs upon Si and quartz substrates was increased and vertically aligned CNTS (VACNTS) was seen. By decreasing and increasing of the ethanol flow rate from optimum amount of 0.8 sccm, low-density of CNTs with spaghetti-like structure was observed. By increasing the growth time from 5 min to 30 and 100 min, the density of VA-CNTS structure upon Si and quartz substrates was increased. 

Keywords